# | Class | status | |
---|---|---|---|
1 |
S:76516324
M:MASK ETCHER IV O:OERLIKON USA INC., PLASMA-THERM, LLC, Unaxis, USA, Inc. |
7 | Dead |
2 |
S:76489969
M:DSE O:Unaxis, USA, Inc. |
7 | Dead |
3 |
S:76192623
M:VERSALOCK MASK ETCHER O:OERLIKON USA INC., PLASMA-THERM, LLC, Unaxis USA, Inc. |
7 | Dead |
4 |
S:75511817
M:VERSALOCK MASK ETCHER III O:OERLIKON USA INC., Plasma-Therm, Inc., PLASMA-THERM, LLC, UNAXIS USA, INC. |
7 | Dead |
5 |
S:75499296
M:AUTOMATED LOADING SYSTEM (ALS) O:OERLIKON USA INC., Plasma-Therm, Inc., PLASMA-THERM, LLC, UNAXIS USA, INC. |
7 | Dead |
6 |
S:75499298
M:VERSALOCK MASK ETCHER II O:OERLIKON USA INC., Plasma-Therm, Inc., PLASMA-THERM, LLC, UNAXIS USA, INC. |
7 | Dead |
7 |
S:74614175
M:VERSALOCK O:OERLIKON USA INC., PLASMA-THERM, INC., PLASMA-THERM, LLC, UNAXIS USA, INC. |
7 | Registered |